Active feedback cooling of a SiN membrane resonator by electrostatic actuation

Feedback cooling of a nanomechanical resonator

Asa Hopkins, Kurt Jacobs, Salman Habib, and Keith Schwab T-8, Theoretical Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545, USA Norman Bridge Laboratory of Physics 12-33, California Institute of Technology, Pasadena, California 91125, USA Laboratory for Physical Sciences, College Park, Maryland 20740, USA ~Received 25 February 2003; revised manuscript received 2 July 2003;...

MEM Analog Tunable Gratings by Electrostatic Actuation

Pull-In Effect of Suspended Microchannel Resonator Sensor Subjected to Electrostatic Actuation

In this article, the pull-in instability and dynamic characteristics of electrostatically actuated suspended microchannel resonators are studied. A theoretical model is presented to describe the pull-in effect of suspended microchannel resonators by considering the electrostatic field and the internal fluid. The results indicate that the system is subjected to both the pull-in instability and t...

Nonlinear static and dynamic behaviors of a microresonator under discontinuous electrostatic actuation

This article studied static deflection, natural frequency and nonlinear vibration of a clamped-clamped microbeam under discontinues electrostatic actuation. The electrostatic actuation was induced by applying AC-DC voltage between the microbeam and electrode plate. In contrast to previous works, it was assumed that length of the electrode plate was smaller than that of the microbeam. In additio...

Tracking and Shape Control of a Micro-cantilever using Electrostatic Actuation

In this paper the problems of state estimation, tracking control and shape control in a micro-cantilever beam with nonlinear electrostatic actuation are investigated. The system’s partial differential equation of motion is converted into a set of ordinary differential equations by projection method. Observabillity of the system is proven and a state estimation system is designed using extended ...